40 CFR §98.92

1. (a)You must report emissions of fluorinated GHGs (as defined in § 98.6), N2O, and fluorinated heat transfer fluids (as defined in § 98.6). The fluorinated GHGs and fluorinated heat transfer fluids that are emitted from electronics manufacturing production processes include, but are not limited to, those listed in table I-21 to this subpart. You must individually report, as appropriate:
   1. (1)Fluorinated GHGs emitted.
   2. (2)-(3) [Reserved]
   3. (4)N2O emitted from chemical vapor deposition and other electronics manufacturing processes.
   4. (5)Emissions of fluorinated heat transfer fluids.
   5. (6)All fluorinated GHGs and N2O consumed.
2. (b)CO2, CH4, and N2O combustion emissions from each stationary combustion unit. You must calculate and report these emissions under subpart C of this part (General Stationary Fuel Combustion Sources) by following the requirements of subpart C of this part.