40 CFR Part 98, Table I-1
Verified against eCFR.gov as of June 20, 2026View official text on eCFR.gov ↗
| Product type | Emission factors EFi |
|---|---|
| CF4 | C2 F6 | CHF3 | c-C4 F8 | C3 F8 | NF3 | SF6 | N2 O |
| Semiconductors (kg/m2) | 0.9 | 1 | 0.04 | NA | 0.05 | 0.04 | 0.2 | NA |
| LCD (g/m2) | 0.65 | NA | 0.0024 | 0 | NA | 1.29 | 4.14 | 17.06 |
| MEMS (kg/m2) | 0.015 | NA | NA | 0.076 | NA | NA | 1.86 | NA |
Notes: NA denotes not applicable based on currently available information.
[89 FR 31919, Apr. 25, 2024]