40 CFR Part 98, Table I-16
Verified against eCFR.gov as of June 20, 2026View official text on eCFR.gov ↗
| Manufacturing type/process type/gas | Default DRE (%) |
|---|---|
| MEMS, LCDs, and PV Manufacturing | 60 |
Semiconductor Manufacturing: |
| CF4 | 87 |
|---|---|
| CH3 F | 98 |
| CHF3 | 97 |
| CH2 F2 | 98 |
| C4 F8 | 93 |
| C4 F8 O | 93 |
| C5 F8 | 97 |
| C4 F6 | 95 |
| C3 F8 | 98 |
| C2 HF5 | 97 |
| C2 F6 | 98 |
| SF6 | 95 |
| NF3 | 96 |
| All other carbon-based fluorinated GHGs used in Semiconductor Manufacturing | 60 |
N2 O Processes |
CVD and all other N2 O-using processes | 60
[89 FR 31922, Apr. 25, 2024]