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40 CFR Part 98, Table I-21 — Examples of Fluorinated GHGs Used by the Electronics Industry

Verified against eCFR.gov as of June 20, 2026View official text on eCFR.gov
Product typeFluorinated GHGs used during manufacture
ElectronicsCF4, C2 F6, C3 F8, c-C4 F8, c-C4 F8 O, C4 F6, C5 F8, CHF3, CH2 F2, NF3, SF6, and fluorinated HTFs (CF3-(O-CF(CF3)-CF2)n-(O-CF2)m-O-CF3, Cn F2n+2, Cn F2n+1 (O)Cm F2m+1, Cn F2n O, (Cn F2n+1)3N).

[89 FR 31924, Apr. 25, 2024.]