40 CFR Table I-1 to Subpart I of Part 98
Default Emission Factors for Threshold Applicability Determination
June 9, 2020
CFR
Open Table
Product type Emission factors EFi
CF4 C2F6 CHF3 C3F8 NF3 SF6
Semiconductors (kg/m2) 0.90 1.00 0.04 0.05 0.04 0.20
LCD (g/m2) 0.50 NA NA NA 0.90 4.00
MEMS (kg/m2) NA NA NA NA NA 1.02

Notes: NA denotes not applicable based on currently available information.

[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68221, Nov. 13, 2013]


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