1. LawStack
  2. Title 40 - Protection of Environment
  3. Chapter I - ENVIRONMENTAL PROTECTION AGENCY
  4. Subchapter C - AIR PROGRAMS
  5. Part 98 - MANDATORY GREENHOUSE GAS REPORTING
  6. Subpart I - Electronics Manufacturing
  7. 40 CFR Table I-2 to Subpart I of Part 98
40 CFR Table I-2 to Subpart I of Part 98
Examples of Fluorinated GHGs Used by the Electronics Industry
June 9, 2020
CFR
Open Table
Product type Fluorinated GHGs and fluorinated heat transfer fluids used during manufacture
Electronics CF4, C2F6, C3F8, c-C4F8, c-C4F8O, C4F6, C5F8, CHF3, CH2F2, NF3, SF6, and fluorinated HTFs (CF3-(O-CF(CF3)-CF2)n-(O-CF2)m-O-CF3, CnF2n + 2, CnF2n + 1(O)CmF2m + 1, CnF2.O, (CnF2n + 1)3N).

[77 FR 10381, Feb. 22, 2012]

Previous
§ 98.96 Data reporting requirements
Next
Table I-3 to Subpart I of Part 98 Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for 150 mm and 200 mm Wafer Sizes

Tried the LawStack mobile app?

Join thousands and try LawStack mobile for FREE today.

  • Carry the law offline, wherever you go.
  • Download CFR, USC, rules, and state law to your mobile device.

Designed and built by Tekk Innovations LLC, the makers of the LawStack iPhone app or Android app.

© 2020 Tekk Innovations LLC