1. LawStack
  2. Title 40 - Protection of Environment
  3. Chapter I - ENVIRONMENTAL PROTECTION AGENCY
  4. Subchapter C - AIR PROGRAMS
  5. Part 98 - MANDATORY GREENHOUSE GAS REPORTING
  6. Subpart I - Electronics Manufacturing
  7. 40 CFR Table I-10 to Subpart I of Part 98
40 CFR Table I-10 to Subpart I of Part 98
Maximum Field Detection Limits Applicable to Fluorinated GHG Concentration Measurements for Stack Systems
June 9, 2020
CFR
Open Table
Fluorinated GHG Analyte Maximum field
detection
limit (ppbv)
CF4 20
C2F6 20
C3F8 20
C4F6 20
C5F8 20
c-C4F8 20
CH2F2 40
CH3F 40
CHF3 20
NF3 20
SF6 4
Other fully fluorinated GHGs 20
Other fluorinated GHGs 40

ppbv—Parts per billion by volume.

[78 FR 68228, Nov. 13, 2013]

Previous
Table I-9 to Subpart I of Part 98 Methods and Procedures for Conducting Emissions Test for Stack Systems
Next
Table I-11 to Subpart I of Part 98 Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (150 mm and 200 mm Wafers)

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