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  2. Title 40 - Protection of Environment
  3. Chapter I - ENVIRONMENTAL PROTECTION AGENCY
  4. Subchapter C - AIR PROGRAMS
  5. Part 98 - MANDATORY GREENHOUSE GAS REPORTING
  6. Subpart I - Electronics Manufacturing
  7. 40 CFR Table I-11 to Subpart I of Part 98
40 CFR Table I-11 to Subpart I of Part 98
Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (150 mm and 200 mm Wafers)
June 9, 2020
CFR
eCFR graphic er13no13.023.gif

[78 FR 68229, Nov. 13, 2013]

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Table I-10 to Subpart I of Part 98 Maximum Field Detection Limits Applicable to Fluorinated GHG Concentration Measurements for Stack Systems
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Table I-12 to Subpart I of Part 98 Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (300 mm and 450 mm Wafers)

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