1. LawStack
  2. Title 40 - Protection of Environment
  3. Chapter I - ENVIRONMENTAL PROTECTION AGENCY
  4. Subchapter C - AIR PROGRAMS
  5. Part 98 - MANDATORY GREENHOUSE GAS REPORTING
  6. Subpart I - Electronics Manufacturing
  7. 40 CFR Table I-12 to Subpart I of Part 98
40 CFR Table I-12 to Subpart I of Part 98
Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (300 mm and 450 mm Wafers)
June 9, 2020
CFR
eCFR graphic er13no13.024.gif

[78 FR 68230, Nov. 13, 2013]

Previous
Table I-11 to Subpart I of Part 98 Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (150 mm and 200 mm Wafers)
Next
Table I-13 to Subpart I of Part 98 Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing for Use With the Stack Test Method

Tried the LawStack mobile app?

Join thousands and try LawStack mobile for FREE today.

  • Carry the law offline, wherever you go.
  • Download CFR, USC, rules, and state law to your mobile device.

Designed and built by Tekk Innovations LLC, the makers of the LawStack iPhone app or Android app.

© 2020 Tekk Innovations LLC