40 CFR Table I-17 to Subpart I of Part 98
Expected and Possible By-Products for Electronics Manufacturinglg
June 9, 2020
Open Table
| For each stack system for which you use the “stack test method” to calculate annual emissions, you must measure the following: | If emissions are detected intermittently, use the following procedures: |
If emissions are not detected, use the following procedures: |
|---|---|---|
| Expected By-products: CF4 C2F6 CHF3 CH2F2 CH3F |
Use the measured concentration for “Xksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to §98.94(j)(2) for the value of “Xksm” when the fluorinated GHG is not detected | Use one-half of the field detection limit you determined for the fluorinated GHG according to §98.94(j)(2) for the value of “Xksm” in Equation I-18. |
| Possible By-products: C3F8 C4F6 c-C4F8 C5F8 |
Use the measured concentration for “Xksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to §98.94(j)(2) for the value of “Xksm” when the fluorinated GHG is not detected | Assume zero emissions for that fluorinated GHG for the tested stack system. |
[78 FR 68234, Nov. 13, 2013]
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