1. LawStack
  2. Title 40 - Protection of Environment
  3. Chapter I - ENVIRONMENTAL PROTECTION AGENCY
  4. Subchapter C - AIR PROGRAMS
  5. Part 98 - MANDATORY GREENHOUSE GAS REPORTING
  6. Subpart I - Electronics Manufacturing
  7. 40 CFR Table I-8 to Subpart I of Part 98
40 CFR Table I-8 to Subpart I of Part 98
Default Emission Factors (1-UN2O,j) for N2O Utilization (UN2O,j)
June 9, 2020
CFR
Open Table
Process type factors N2O
CVD 1-Ui 0.8
Other Manufacturing Process 1-Ui 1.0
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Table I-7 To Subpart I of Part 98 Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for PV Manufacturing
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Table I-9 to Subpart I of Part 98 Methods and Procedures for Conducting Emissions Test for Stack Systems

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