40 CFR Table I-7 To Subpart I of Part 98
Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for PV Manufacturing
June 9, 2020
CFR
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Process type factors Process gas i
CF4 C2F6 CHF3 CH2F2 C3F8 c− C4F8 NF3
Remote
NF3 SF6
Etch 1-Ui 0.7 0.4 0.4 NA NA 0.2 NA NA 0.4
Etch BCF4 NA 0.2 NA NA NA 0.1 NA NA NA
Etch BC2F6 NA NA NA NA NA 0.1 NA NA NA
CVD Chamber Cleaning 1-Ui NA 0.6 NA NA 0.1 0.1 NA 0.3 0.4
CVD Chamber Cleaning BCF4 NA 0.2 NA NA 0.2 0.1 NA NA NA

Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.

[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68225, Nov. 13, 2013]


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